IXRF - Model ATLAS M -Benchtop micro XRF Spectrometer
IXRF Systems’ ATLAS M benchtop microEDXRF (micro XRF) spectrometer is the latest general-purpose micro spot energy dispersive X-ray fluorescence (EDXRF) spectrometer microscope for the measurement and mapping of elements from sodium (Na) through uranium (U). Designed to image and analyze a wide variety of sample types, ATLAS leads the industry in virtually every major specification category, from the most powerful software and the highest detector active area to our superior perpendicular (normal) X-ray tube geometry and smallest micro spot.
ATLAS’ Iridium Ultra software platform, developed with SEM/EDS elemental mapping and analytical functionality, is unsurpassed in its ability to provide elemental and phase mapping, line scans, critical dimensions (CD), as well as qualitative and quantitative elemental analyses of solids, liquids, particles, powders, and thin films. The functional, flexible, and feature-rich software suite guarantees unprecedented productivity. ATLAS M is the micro-XRF (μXRF) elemental analyzer that leads with innovation.
Micro X-ray fluorescence (µXRF, µEDXRF, micro-XRF, microEDXRF) spectroscopy is an elemental analysis technique that relies on the same principles as X-ray fluorescence (XRF) spectrometry. The difference is that micro x-ray fluorescence (microEDXRF) spectrometry has a spatial resolution with a diameter many orders of magnitude smaller than conventional XRF, WDXRF or EDXRF spectrometers. Practically, microEDXRF spectrometers with high-precision scanning XYZ-stages — like the ATLAS series — function as a type of XRF hyperspectral imaging microscope, where each pixel (in a map or image) contains information from 4 – 40 keV in the electromagnetic spectrum.
While a smaller excitation spot can be achieved by restricting X-ray beam using a pinhole aperture, this method blocks much of the X-ray flux which has an adverse effect on the sensitivity of trace elemental analysis. Modern polycapillary focusing X-ray optics are able to create small focal spots of just a few micrometers in diameter. By using such X-ray optics, the IXRF Systems’ ATLAS series of imaging spectrometers provide a tiny focal spot (down to 5 μm, depending on desired configuration) that is much more intense and allows for enhanced trace element analysis and the creation of hyperspectral images of a sample. Micro X-ray fluorescence (μXRF) spectometry is commonly employed in many applications, such as: botany, cement, forensics, small feature evaluations, elemental mapping, mineralogy, metals & alloys, electronics, multi-layered coating analysis, micro-contamination detection, film and plating thickness, biology and environment.*
ATLAS M is the bench-top micro XRF tool of choice for sample characterization using micro X-ray fluorescence (micro-XRF) hyperspectral imaging microscopy for information on composition (phase) and elemental distribution. With the smallest X-ray spot in the industry at 5 μm, this unique XRF microscope is optimized for analysis speed without compromising accuracy. The instrument can measure a wide range of sample types, whether small or large, even or irregularly shaped. Equipped with a large high-speed stage, it supports 2D analysis of virtually any kind of sample: solids, liquids, powders, thin-films and particles. Its large vacuum chamber delivers superior light element (low-Z) sensitivity.
When it comes to XRF microscopic imaging (mapping), smaller is always better. Above is a TEM grid. The image on the left was captured using the ATLAS M`s 5 μm X-ray spot. The inferior image on the right was taken with a 10 micron X-ray spot.
- Perpendicular micro XRF geometry allows for circular excitation down to 5 μm for highest resolution.
- Beam is normal to the surface for most accurate hyperspectral imaging as beam is NOT an ellipse
- Competitor’s inferior angled geometry only allows smallest spot to be 25 microns due to the ellipse.
- Mix and match up to 4 Silicon Drift Detectors (SDD)
- For the largest possible solid angle collection efficiency
- Up to 600 mm2 active area
- Available resolutions: ≤130-145 eV resolution
- Highest count rate with the smallest micro-XRF spot for fast high-res images