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KCS Europe GmbH
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  5. KCS - Model UBMS Series - Batch System

KCS - Model UBMS Series -Batch System

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UnBalanced Magnetron Sputtering

UBMS® series is batch system using Unbalanced Magnetron Sputtering method. Since this system can provide fine and high density films, it is suitable for lubrication film coating such as DLC and Molybdenum disulfide.

Most popular related searches
coating equipment
hardness control
aluminum can
screw pump
sputtering system
  1. Plasma density is increased near substrate by imbalanced magnetic field.
  2. Maximization of ion-assist effect.
  3. Control of Film Properties: Composition, Adhesion, Crystallization, Surface condition.

Argon ion is activated in plasma and hits target.  > Activated argon ion sputters out metal atom from target.  > Film deposition is made with sputtered metal ion.

Features of DLC by UBMS®

DLC (Diamond-like carbon) has widespread applications such as car parts, mechanical components, dies, molds etc. because of its high mechanical hardness, chemical inertness, and low friction behavior. KOBELCO can offer optimized DLC for each customer’s target by tuning coating parameters.

Applications of DLC and more

  • Automobile parts (engine parts/ fuel pump parts)
  • Mechanical parts (Ball bearing, ball screw, hydraulic pump parts)
  • Cutting tools for aluminum
  • Spinning tools for aluminum can
  • Trimming dies for SUS/Copper tube
  • Punches for SUS/aluminum sheet and more

Advanced DLC by UBMS®

  • High Adhesion DLC
    • Ion assist effect by UBM
    • Optimized Interlayer
  • Hardness control and Multi-layer DLC
    • Ion assist effect by UBM
  • Metal-doped DLC
    • Co-sputter with metal target and carbon
  • Hydrogen content controlled DLC
    • Solid carbon source
  • Hybrid coating with AIP and more

NameTypeHardness (Hv) Thickness (μm)Feature & Typical Applications

BELCOAT
B		 Standard 1,500
to
2,500		 0.5
to
5		 Balance of Wear Resistance, Lubricity and Adhesion.Common Mechanical Component.
BELCOAT
HB		 High
Hardness		 2,500
to
3,500		 0.1
to
0.2		 Focused on Wear Resistance Automotive Component Stamping Mold (For Non-Iron, Stainless Steel)
BELCOAT
UB		 Ultra High
Hardness		 3,500
to
4,000		 0.1
to
0.2		 Focused on Wear Resistance Under High Pressure Automotive Component For Racing Use Cutting Tool(Non-Iron)
BELCOAT
NB		 Nano-Multi
Layer		 1,500
to
2,500		 0.1
to
0.15		 Balance of Wear Resistance and Lubricity Toughness with Shock Resistant, Bearing, Punching Die
BELCOAT
MB		 Metal Doped 1,000
to
2,000		 0.15
to
0.25		 Property Change by Metal Doping Relief of Film Stress Automotive Component, Plastic Injection Mold