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KITZ SCT - Model UXG/LG Series -Vacuum Gate Valves
KITZ SCT AMERICA Corporation offers the UXG/LG series of valves and fittings, which are engineered for high-performance applications. These products accommodate a range of materials and shapes, ensuring versatile compatibility with diverse systems. Tailored for precise control and reliability, the UXG/LG series is suited for critical applications in industries that demand stringent standards and operational consistency. Advanced manufacturing processes and quality materials ensure longevity and dependability, making them ideal for environments that require robust mechanical performance.
The UXG and LG series are gate valves developed for separating a semiconductor vacuum system's reactor from the transfer chamber. The valve bodies are made of aluminum, and the valves operate via double action pneumatic actuator. The heated gate valves not only heats the exterior using a conventional external heater but the built-in internal heater in the moving parts heats from the inside simultaneously, providing highly uniform heating performance. The body and valve body can be set to an arbitrary temperature up to a maximum 180C
- Size : 12"(300mm type)
- Pressure Range : 1.4x10-10~29psiga (1x10-6 Pa~0.101 MPa (abs))
- Valve Seat Differential Pressure Resistance : 14.6 psig (0.101 MPa(G)) (Positive/Back pressure)
- Bellows Pressure Resistance : 0.02 MPa (G)
- Permissible Differential Pressure for Valve Operation : 1.3 KPa
- Leak Rates : Across the Seat He Leak Rates : ≤ 1×10-9 sccs (for 30 seconds at room temperature)
- ≤ 1×10-4 sccs (≤ 1×10-5 Pa·m3/sec)(for 30 sec at raised temperature
- Inboard He Leak Rates : Allowable external leakage: ≤ 1×10-9 sccs (≤ 1×10-10 Pa·m3/sec)
- Operation : Double action pneumatic cylinder
- Actuation Pressure : 72~101 psig (0.5~0.7MPa (G))
- Actuation Reaction Time : 0.8~2 seconds (orifice controlled)
- (Actuation Pressure 0.5 MPa(G)) : 1.5~2 seconds (speed control included)
- Maximum Heater Temperature : 180ºC
- * 160°C (when the gate O-ring material is fluorine rubber)
- Time To Reach Set Temperature : Reaches highest temperature setting within 1.5 hrs
- Maximum Operating Temperature : 210°C (heated type)
- 60°C (non-heated type)
- Insulation Resistance : 10 MΩ or more at DC 500V
- Bellows Cycle Life : 1 million cycles
- Particle Performance (Target Value For Reference) : The number of particle sized larger than 0.1 µm to be no more than 0.3 on average *
- Because the valve can be heated to high temperatures, it reduces contamination accumulation and adhesion to the seat so to greatly extend the maintenance period.
- The body heater and valve heater are in separate channels, so the internal and external temperatures can be set individually.
- Has a non-sliding structure that keeps particles from being generated during opening and closing operations.
- Equipped with a latch lock mechanism that keeps the valve closed during an emergency such as when the operating air pressure is lost.
- Fluorine rubber,KALREZ® *1, Chemraz® *2, or other materials for the gate O-ring is available depending on the fluid temperature and chemical characteristics of the
fluid.
- The valves are designed to be used under atmospheric pressure. Usage such as under vacuum vessels are not guaranteed.
- For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance