Korvus Technology - Model HEX-L -Mobile Base-stand-mounted System

The integration of the HEX or HEX-L series into gloveboxes provides a pivotal solution for handling air-sensitive materials. Unlike traditional PVD systems that require the entire chamber to be housed within a glovebox, the HEX Series offers a unique modular approach. This design allows the PVD chamber to be integrated through the floor of the glovebox, freeing up significant space inside and reducing contamination risks. The inert environment within gloveboxes, typically filled with argon, is essential for sensitive substrate work involving organic materials or reactive metals like lithium. The positioning of the HEX Series' chamber panels beneath the glovebox facilitates easier chamber cleaning without introducing contaminants. Furthermore, this modular integration can be conducted anytime post-purchase, offering flexibility and adaptability to researchers who may need to modify their setups later.