Lumina - Model AT2 -Laser Optical Scanning Systems

The AT2 system is capable of scanning any flat shape less than or equal to 450mm x 450mm. Resilient: Capable of scanning fragile and thin samples. Robust: Dynamic beam tracker enables compensation for substrate bow and warp. Optional bow measurement module is also available. Efficient: Full-surface scan of 300mm wafer in 2 minutes. Sensitive: : 200nm PSL sensitivity on silicon and 300nm PSL sensitivity on glass.