Load Lock Inflatable Seal/Clamp

A load lock inflatable seal is a unique product made of low outgassing butyl rubber material. It has been tested for vacuum service and provides a highly efficient and repeatable seal in the patented vacuum load lock section of a fully automated electron beam metrology system. This metrology system is used for sub-micron critical dimension measurement and integrated circuit imaging. With its unique blend of automation, measurement precision, and high throughput, the system meets and exceeds the process control needs of advance semiconductor manufacturing lines. The load lock inflatable seal simplifies the hardware necessary to achieve a seal in vacuum, and speeds the process of taking a wafer, loading it into the lock, and making critical measurements relative to its surface and its circuitry. The design life for these semiconductor seals is 600,000 cycles at 40 PSIG, and a representative sample was factory tested to 1,000,000 cycles at 75 PSIG.