Löwener - UHV Systems

FromLöwener Vacuumservice AB

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UHV system used for degassing of infra red camera CCD`s in their capsules. A series of smaller individual object chambers are attached to a larger main chamber. Each chamber has its own heating cover and regulator. All temperatures are monitored dual places for redundance and to minimize the risk of damaging the objects. The ultra high vacuum level needed for this application is obtained by an ion pump.

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Various systems utilizing high- or ultra high vacuum equipment; evaporation chambers, annealing systems, etc.

Systems can also comprise mass spectrometers, residual gas analysers or leak detectors for different gases.

A UHV (ultra high vacuum) chamber designed for laboratory research work.

The system was used to develop and verify a method of anti reflective treatment of lasers.

In order to reach the desired vacuum level, a rough pump / turbo combination is supporting a cryo pump, which enables a pressure level of less than 10E-10 mbar. Test objects are loaded thru a gate valve on the side.

A UHV (ultra high vacuum) chamber designed for laboratory research work.

An advanced and technically complex system utilizing a UHV (ultra high vacuum) chamber.

The system is used to coat semi conductor components using electron beam while measuring the thickness of the applied coating.

In order to reach the desired vacuum level, a rough pump / turbo combination is supporting a cryo pump, which enables a pressure level of less than 10E-10 mbar.

A high torque servo motor is used to position an internal carrier via a specially designed vacuum sealed shaft.