Lumina Instruments, Inc
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Lumina - Model AT1-Auto -Laser Optical Scanning Systems
The Lumina AT1-AUTO integrates the Lumina AT1 with a single arm robot/automated cassette handler for 150 and 200 mm circular wafers.
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Temperature: 18 - 30 °C
Voltage: 120/230 VAC
Current: 6 A/4 A
Weight: TBD
Dimensions: 1580 x 2004 x 1308 mm
(62.2 x 78.9 x 51.5 in.)