Lumina - Model AT1 -Laser Optical Scanning Systems

The AT1 system is capable of scanning any flat shape less than or equal to 300 mm x 300 mm. Resilient: Capable of scanning fragile and thin samples Adaptable: Scans transparent (glass), semiconductor, or metal substrates. Efficient: Full-surface scan of 150 mm wafer in 3 minutes. Sensitive: 100 nm PSL sensitivity on silicon and 150 nm PSL sensitivity on glass.