- Single platform supporting a wide variety of substrates
- High-performance wafer handling capability proven for most advanced process nodes
- Throughput
- Cleanliness
- Reliability
- Optimized solution for advanced packaging applications
- Shortest path from order to operation
- Configure to order
- Fast set up
- Lower installation risks
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Marathon LEAP - Model AX -Atmospheric Systems
The Marathon LEAP™ AX is a revolutionary wafer transfer platform that addresses customers' current and future needs for atmospheric systems. Brooks understands the challenges customers face in responding to rapidly changing requirements and business conditions, and the Marathon LEAP AX offers unique value and capabilities to meet their demanding technical and operational needs.