Mass Flow Online - Model Mass-View - MV-401 -Mass Flow Controller

Pre-installed ranges
Ranges: Flow range (relative Air)

• Range 1: 20 mln/min .. 200 mln/min (sccm)
• Range 2: 20 mln/min .. 100 mln/min (sccm)
• Range 3: 20 mln/min .. 50 mln/min (sccm)

Pre-installed gases
Gases: min. range .. max. range

• Air, N2, O2 and CO: 20 .. 200 mln/min (sccm)

• Clear indication in:
  
  • actual flow rate (bar graph and value)
  • desired flow units
  • type of gas
  • totalised flow
• Bright, wide-angle OLED display
• Free of parallax error
• Virtually independent of temperature and pressure variations
• Low pressure drop
• Wide flow ranges
• Fast response
• High accuracy
• Electronic output:
  
  • Analog (0 .. 5 Vdc)
  • RS-232 interface (with FLOWBUS)
  • Modbus-RTU/ASCII interface
• Configurable password protection
• Alarm and counter functions
• Relays
• Multi Gas / Multi Range
• 10 Pre-installed gases
• Membrane operated valve
• High resolution needle valve
• Digitally calibrated
• Free software tools

• MASS-VIEW flow controller
• packing box
• 9.17.054 Short form manual
• (optional) fittings
• (optional) power supply
• (optional) Battery Pack

Measurement/control system:

• Flow range: 20.. 2000 mln/min (seem) Mass flow units In/min and SLM refer to normal operating conditions, i.e. 0°C (32°F) and 1013 mbar (14.7 psi)
• Accuracy: ± 2% RD for flow > 50% of max. capacity ± (1 % RD + 0.5% FS) on lower flows Technical specifications are based on Air at maximum FS
• Repeatability: < 0.2% FS typical
• Temperature rating: 0... 50(32... 122°F)
• Operating pressure: 0... 10bar(g)/0... 150psi(g)
• Pressure coefficient: ± 0,2% Rd/bar typical at Air
• Pre-installed gases: Air, N2,02, C02, CO, N20, AR, CH4, C3H8 and C4H10
• Standard calibration gas: Air, other gases are converted using our Fluidat® conversion model which will introduce extra inaccuracy
• Rangeability: up to 1:100
• Response time (sensor): (t63%) 2 seconds
• Temperature coefficient: Zero:
• Leak integrity, outboard: tested < 2 x 10-9 mbar l/s
• Attitude sensitivity: < 0,1 % FS

Mechanical parts:

• Material (wetted parts): Meter: aluminium, Viton (FPM) Needle Valve: Fluorosint, Brass, Buna N Controller: membrane Fiber-reinforced nitrile
• Test pressure: 21 bar{a)/300psi(a)
• Min.AP: 1 bar(d)
• Max.AP: 7 bar(d)
• Process connections: G 1/4" BSPP female (compression fittings optional)
• Seals: Viton8, PTFE, Fluorosint* Buna N; Controller membrane: fiber-reinforced nitrile
• Weight: 1,4 kg
• Ingress protection: IP40
• Control Accuracy: < 0,5-1% Rd/bar

Electrical properties:

• Power supply: +l5...24Vdc(+/-10%)
• Max. power consumption: approx 135 mA
• Analog output: 0...5Vdc
• EMC: EU declaration
• Digital Communication: RS232 / RS485 {Modbus RTU/ASCII)
• Min. And max. Relay contacts: switching current 0.5 A, 24 Vdc one side grounded (0 Vdc power)
• Electrical connection: 8-pin RJ-45 modular jack