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Merit Sensor - Model L Series -MEMS Pressure Sensor for Low-Pressure Applications
The L Series is an ultra-sensitive and stable MEMS silicon die developed by Merit Sensor specifically for low-pressure applications. These applications include devices like CPAP machines and air handlers where precise pressure measurement and stability are crucial. The L Series utilizes piezoresistive technology, which means it operates by detecting mechanical deflection in the silicon diaphragm caused by pressure. This mechanical deflection then alters the electrical properties of implanted resistors, yielding a change in output signals. This makes the L Series highly suitable for applications requiring accurate measurement and consistent performance in low-pressure environments.
The L Series is an ultra-sensitive and stable MEMS die that is ideal for low-pressure applications, such as CPAP and air handlers.
- Pressure0.15 to 1 psi (10 to 68.95 mbar; 1 to 6.89 KPa)
- Temperature-40 to 150 °C
- ConfigurationGage or differential
- MediaClean, dry air and non-corrosive gases
- ShippingWafers on tape
- FlexibilitySensitivity, resistance, bridge, constraint, etc.
- Size3.3 x 3.3 mm
- Performance : Enjoy best-in-class performance due to Merit’s proprietary Sentium technology
- Cost : Save money over time with high-performing die
- Security : Feel confident doing business with an experienced company backed by a solid parent company (NASDAQ: MMSI)
- Speed : Get to market quickly with creative and flexible solutions.
- Service : Experience prompt, personal and professional support.