MKS Inc.
MKS - Model GE50A013103SBV020 -Mass Flow Controller
FromMKS Inc.
The GE50A013103SBV020 elastomer-sealed Mass Flow Controller features 1000 sccm, with 0.25 in. Swagelok-style fitting, a DB15 connector, with a Viton seal.
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- Type : Mass Flow Controller
- Full Scale Flow Range : 1000 sccm
- Calibration Gas : Nitrogen
- Fitting Type : 0.25 in. Swagelok
- Seal Material : Viton
- Analog Connector : Analog 0-5 VDC (15 pin D connector)
- Maximum Inlet Pressure : 150 psig
- Normal Operating Pressure Differential : 10-5000 sccm: 10-40 psid, 10000-20000 sccm: 15-40 psid, 30000-50000 sccm: 25-40 psid
- Burst Pressure : 1500 psig
- Typical Accuracy :
- ±1% of set point for 20-100% Full Scale
- ±0.2% of Full Scale for 2-20% Full Scale : Repeatability
- ±0.3% of Reading :
- Resolution : 0.1% of Full Scale
- Zero Temperature Coefficient : <0.05% of Full Scale/°C :
- Span Temperature Coefficient : <0.08% of Reading/°C
- Inlet Pressure Coefficient : <0.02% of Reading/psi
- Typical Settling Time : <750 msec, typical above 5% Full Scale
- Warm-up Time : 30 minutes
- Operating Temperature : 10-50°C
- Storage Humidity : 0-95% relative humidity, non-condensing
- External Leak Integrity : <1 x 10-09 (scc/sec He)
- Leak Integrity Through Closed Valve : Up to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere
- Wetted Material : 316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
- Surface Finish : 16µ inch average Ra
- Weight : 3 lbs (1.4 kg)
- Compliance : CE