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- Model YIS-100SP to 300SP - Famous Magic ...
Model YIS-100SP to 300SP -Famous Magic Mirror System
This is the well known technology, called as "Magic Mirror" or "Makyo Inspection system" to be able to inspect semiconductor wafer surface for latent damages. Non-contact and non-destructive test method. It can be used for Si Wafer, GaAs wafer, Polished flat Glass surface, Sapphire wafer, semi-transparent wafer surface, polished metal surface and many others. Optics requires no maintenance and lamp has to be replaced for a maintenance. Other options, such as automated damage inspection software and printer options.
- Full view inspection system and you can inspect entire wafer on the screen with a sensitivity of submicron level damages and latent hidden damages.
- Optics is compatible with Class 1
- Optics is maintenance free and only it requires is to change the lamp
- Magic Mirror has sensitivity adjustment capability and is capable of adjusting inspection sensitivity depending on your threshold level.
- Wafer surface inspection
- Slip line detection on EPI, SIMOX and annealed wafers
- Polished glass, Sapphire, and any polished transparent or semi-transparent surface
- All polished flat surface
Inspection size 4 inch dia. To 12inch dia. Applicable defects Flatness, Dimple, Mound Saw Mark, orange peel and others Magnification 1 and 3X comes as standard Sensitivity Adjustable sensitivity Light source 550nm constant light intensity control Camera High Resolution CCD camera Stage Manual stage (standard).
- Motor controlled rotating inspection stage
- Automated Defect Detection Image Processing Software
- Screen Image Printer
- Wafer handling robot and wafer transfer system
Note: Demonstration of Magic Mirror is available on request at our factory. We welcome your samples and we are more than happy to inspect samples.