JYT - Model JD-1200 -Mono-Crystal Furnace
JD-1200 Mono-Crystal Furnace is a flexible shaft lifting-pulling type mono-crystal furnace. It is a device used in the inert gas atmosphere using the graphite resistance heater to melt certain silicon materials for growing dislocation- free mono crystals by the Czochralski method. It can produce high-quality silicon mono-crystal required by large-scaled integrated circuits. This equipment can use maximum 28inch hot-zone system with charging of maximum 370KG to grow mono-crystals of 10inch or less. Its production capacity has increased 20% compared with the JD-1100 Mono-Crystal Furnace as a result of increased charging. It is the sister model of JD-1100 Mono-Crystal Furnace. Besides having the characteristics of the JD-1100 Mono-Crystal Furnace, it has greatly improved in design, convenient maintenance, automaticity and other performance standards.
- Model : JD-1200
- Product Name : Mono-crystal Furnace
- Power Voltage : 380V
- Power Frequency : 50Hz
- Heating Method and Heating System : Resistivity Heating and Graphite Heater
- Main Heater Maximum Power : 165KW
- Main Heater Maximum Heater Voltage/current : 55V/3000A
- Auxiliary Heater Maximum Power : 60KW
- Auxiliary Heater Maximum Heater Voltage/current : 50V/1200A
- Whole Power Supply : ≤240KW
- Maximum Temperature inside Main Chamber : 1600?
- Vacuum Level at Normal Condition : ?3Pa
- Diameter Range of Ingot : ≤10″
- Capacity Volume : Max 370kg
- Raw Material : Poly-silicon Material
- Dimension of Main Chamber : ?1200×1400mm
- Rotary Valve Size : ¢360
- Size of Pulling Chamber and Operation Chamber : ¢360×4600mm
- Seed Pull Speed Range : 0.1~10mm/min
- Seed Jog Speed : ≥500mm/min
- Seed Rotation Speed Range : 2~30rmp
- Crucible Lift Rate : 0.02~1mm/min
- Crucible Rotation Speed Range : 1~30rpm
- Total Seed Travel Inside Pulling Chamber : ≥4000mm
- Total Height of Main Furnace : 10242mm
- Footprint of Main Furnace : 2518mm×1700mm
- Occupied Area of Whole Furnace : 5500mm×6500mm
- Requirement of Inflow (Pressure) : Max 0.40Mpa Pressure ifference0.2Mpa
- Cooling Water Consumption / Run : ≥25 m3/h
- Cooling Water Inlet Water Temperature : 25-28?
- Argon Amount / Run : 0.3Mpa~0.7Mpa≈110L/min