M-O-T Mikro- und Oberflächentechnik GmbH
MOT - Model µSRD -Spin Rinse Dryer
The MOT SRD suits for all batch applications. The sophisticated MOT μSRD software makes the operation extremely easy by using a Touch Panel; the SRD system offers 10 different built-in process programs according to different wafers. To further simplify operation for the user, a full range of settings can be pre-configured before the MOT μSRD is sent out.
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wet bench system
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CORPUS
- Material: PP white or Stainless Steel
- optional PPs white, PVDF (with yellow card),
- Door material: PP white or PVC transparent,
- Compliant designed for clean-room environment, easy to be integrated into Wet Bench systems.
- Easy-to-Use GUI operation that anyone can learn. The operator only need to select the recipe.
- Economical and Efficient Quick ramp DC-motor integrated; the fully automated system provide excellent reliability.
- Flexible The MOT μSRD can be programmed to select individually or multiple different types of recipe within a single program; media dispense, rinse and spin events can also be programmed in any order desired.
- Resistivity Monitor
- Anti Static with N2 purge
- ION system Anti Static with remote N2 Heater
- DI water recirculation
- Emergency Power Off
- Extended Parts & Labor Warranty