Nanochem UHP Gas Purification System

Nanochem UHP Gas Purification.

Learn more about Nanochem capabilities - get the Nanochem Purifier Overview Brochure.

Go to the Nanochem Product Data page on this website to learn more about Nanochem:

• types of gas purification media
• choices for purifier hardware configurations

Gas Purification Optimized for Semiconductor Fabrication Applications.

Nanochem Gas Purifiers enable the "extreme purification" of gases used in wafer and semiconductor fabrication, including the removal of dopants and volatile metals.

"Live gas" testing is done to ensure that Nanochem^® gas purifiers meet or exceed performance specifications in the specific gas for which they are marketed.

Nanochem purifiers remove:

• moisture (water)
• hydrocarbons
• halocarbons
• carbon dioxide
• oxygen
• dopants
• volatile metals
• more