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Nanotech Digital - Butterfly Valve
Body Material : Aluminum or Stainless Steel; Compact Design; Integrated Controller High Performance; Easy Maintenance using Repair Parts Kit; Applications : Pressure control for semiconductors and industrial process.
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| Material | Manual/ Pneumatic | STS304 |
| Mechanism | STS304 | |
| Gate Sealing | FKM(VITON) | |
| Flange Size(D) | DN40, DN50 | |
| Feedthrough | Rotary Feedthrough | |
| Actuator | Steper Moter | |
| He Leak Rate | 1X10-9 mbar.l/sec | |
| Pressure Range | 1X10-8 mbar to 1.2 bar | |
| Differential Pressure on the Gate | ≤ 1.4bar | |
| Differential Pressure at Opening | ≤ 30mbar | |
| Cycles until First Service | 250,000 | |
| Temperacture | Body | ≤ 150°C |
| Controller | ≤ 35°C | |
| Installation Direction | Any | |
| Interface | RS232, RS485, Devicenet, Profibus, EtherCat |