PMT (GB) Limited
PMT - Model KS-41B -Particle Counter
FromPMT (GB) Limited
The KS-41B particle counter allows for the first time the counting and size classification of 70 nm particles in photoresists, SOG, ARC and other polymer solutions. In addition, it is a high-end liquid particle counter and the industry standard in ArC and immersions lithography. Sophisticated calibration concepts document the extremely high counting efficiency of the system.
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- Smallest channel 100 nm, (optional from 0.07 μm)
- Suitable for photoresist, SOC / SOG, ARC and other polymeric compounds,
- Max 10 particle channels in the range between 0.1 and 0.5 μm (optional from 0.07 μm)
- Suitable for continuous online operation
- Suitable for batch operation
