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Phosphoric Acid
Phosphoric Acid is highly selective in etching Si3N4 instead of SiO2. In combination with INTEROX hydrogen peroxide and water, it is used to etch aluminium and InGaAs selective to InP.
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Electronic Grade Phosphoric Acid is manufactured in Bernburg, Germany. It is tailored to the needs of the electronic industry with a focus on the wet processing steps in the manufacture of semiconductor wafers.
Electronic Grade Phosphoric Acid is available in 3 grades.
- Product name: Phosphoric Acid 80 % - 87 %
- Chemical name: Phosphoric acid
- Type of product: Mixture
- Synonyms: Orthophosphoric Acid, White Phosphoric Acid
Substance name:
- Phosphoric acid: >= 80 - <= 87 %
- CAS-No.: 7664-38-2 / EC-No.: 231-633-2 / Index-No.: 015-011-00-6
- Agriculture industry
- Chemical industry
- Cleaning agent
- Electronic industry (Semiconductors)
- Etching agent
- Fertiliser
- Laboratory chemicals
- Metal treatment
- Paint
- Textile industry
- Food additives and acidity agent
- Pharmaceuticals
- Appearance: viscous liquid
- Colour: colourless
- Odour: characteristic
- Melting point / freezing point: ca. 21 °C
- Boiling point / boiling range: ca. 135 °C
- Flash point: ./.