PMS AirSentry II - Point-of-Use Ion Mobility Spectrometer (IMS)
The AirSentry® II family of ion mobility spectrometers detect and alert users to small concentrations or changes in airborne levels of chlorides, acids, amines and ammonia-containing species. With parts-per-trillion (ppt) sensitivity, these point-of- use sensors provide fast response, increased detection selectivity and repeatable performance. Combining Air Sentry II sensors with a central so ware platform allows for easy data acquisition and analysis. The AirSentry II family of sensors provide continuous actionable data, to enable efficient response to contamination sources and events.
Ensure your operators and processes are safe with high sensitivity particle monitoring. AirSentry® II provides fast response and repeatable performance.
Monitors a Range of Contaminants
AirSentry® II detects and alerts users to small concentrations and changes in airborne levels of chlorides, acids, amines, and ammonia-containing species.
70 Parts Per Trillion
Resolve process issues or leaks before they impact product quality with early detection. These sensors have a sensitivity of 70 parts per trillion, so you discover changes quickly and react fast.
- Point of Use: AMC Monitoring: AirSentry® II Point-of-Use Ion Mobility Spectrometer
- Manifold: AMC Cleanroom Monitor: AirSentry® II Multi-point System
- Mobile: AMC Mobile Detection System: AirSentry® II Mobile System
Combine models for a comprehensive solution. For example use the point-of-use sensor with a manifold enables broad coverage, or with a central software platform allows for easy data acquisition and analysis.
- Continuous AMC monitoring of critical locations
- Robust and reliable data acquisition, control and analysis
- Long-term data stability
- Lowest cost-per-test
- High-sensitivity detection of acids and bases (amines, ammonia and chlorides)
- Versatile product configuration for pointof-use, multi-point and mobile monitoring applications
- Compact size allows placement in any location
- Ethernet, RS-232, 4-20 mA outputs
- Real-time corrosion monitoring within etch process locations
- Real-time amine and ammonia monitoring within critical lithography systems
- Quantification of chemical filter efficiency
- Tracking and troubleshooting of airborne molecular contamination sources throughout cleanroom and in process tools
- Analysis of airborne molecular contamination (AMC) within FOUP wafer storage modules
- Contaminants detected: Individual analyzers to detect Ammonia, Amines, or Acids
- Range: 0 – 50 ppbv
- Sample flow: < 1000 cc/min
- LDL (3σ)*: 70 pptv
- Response time: < 5 min to 95% (Dry)
- Cleardown time: < 5 min to 5% (Dry)
- Temperature range: Operating: 59 – 86 °F (15 – 30 °C)
- Storage: - 40 – 122 °F (- 40 – 50 °C)
- Humidity range: Operating: 30 – 60% RH
- Storage: 0 – 90% RH
- Dimensions (H x W x L): 4 x 9 x 12 in (10 x 23 x 31 cm)
- Weight:
- 5 lb (2.3 kg)
- * 5 minute sample averaging, 760 Torr
Utility Requirements
- Power: 100 – 240 VAC (50/60 Hz), 60 W
- Clean Dry Air (CDA): < 1000 cc/min, < - 60 °C dew point, 5 psig pressure regulated, no particles > 50 m, hydrocarbon free
- Vacuum: < 33 kPa (absolute)
Communication
- Data output: Ethernet (to Facility Net so ware), RS-232 (to HyperTerminal), 4-20 mA
- User interface: 4 LEDs, 2 buttons (Zero/Span Calibration)