Angstrom Sciences, Inc.

Reactive Gas Control

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FlotronTM and FloTronTM X (fast CCD spectrometer-based) systems are high-speed closed-loop process controllers, designed for real-time, in-situ precision control of reactive sputtering-based vacuum coating and plasma treatment processes. They are complete, compact, flexible, convenient to use, and economical solutions which can be readily integrated into new as well as existing processes. Equally at home in production or R&D tools, the FloTronTM can bring about demonstrable improvements in process stability, repeatability, and yield. A wide range of accessories are available including the world’s first sensor specifically designed for HIPIMS

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FloTronTM systems have no moving parts, interface to PCs, HMIs and PLCs through Ethernet (standard), RS485 (standard) and PROFIBUS (optional) and will accept a wide range of sensor inputs including analog (0 to 10 VDC) and optical (fast spectrometer or photomultiplier-based) signals.

The Graphical User Interface (GUI)is intuitive in use and makes extensive use of clear, easily understood graphics and process menus. System integration and process optimization take advantage of the most complete, comprehensive, and easy to use control software in the industry; rapidly reducing the time to establish a fully functional process.

Coupled with Angstrom Sciences’ broad experience and leading market position in planar and cylindrical magnetrons, this collaboration places Angstrom at the forefront in offering the broadest industry range of performance and application specific designs in a complete package that provides a total solution for high performance reactive sputtering processes. Angstrom Sciences can also provide on-site process support and integration of the FloTronTM systems (please contact us for specific options and pricing); providing our customers with both hardware and fully integrated solutions. Please contact our sales group for more details. A straight-forward questionnaire will help determine what system configuration best suits your needs.