Beneq
Beneq - Model R2 -Research Equipment
FromBeneq
Compact, scalable. Your perfect ALD research partner at EUR 130 000. A premium ALD reactor packaged in a compact enclosure. Ergonomically designed from the ground up for performance and ease of use. Modular design allows for quick upgrades and maintenance.
Build your R2
- 4 liquid sources. Uses standard 50 ml Swagelok containers.
- Single-wafer reaction chamber
- Spare part and consumables kit
- Packing and shipping CIP to airport
- Commissioning and start-up (incl. 3 days onsite)