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TESCAN VEGAModel LMS -Scanning Electron Microscope (SEM)

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TESCAN VEGA’s 4th generation Scanning Electron Microscope (SEM) with tungsten filament electron source combines SEM imaging and live elemental composition analysis in a single window of TESCAN’s Essence™ software. This combination significantly simplifies acquisition of both morphological and elemental data from the sample, making VEGA SEM an efficient analytical solution for routine materials inspection in quality control, failure analysis and research labs.

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Electron Gun: Heated tungsten filament cathode Electron Optics: Wide Field Optics™ Technology with Intermediate Lens™ and In-Flight Beam Tracing™ Resolution: High Vacuum Mode: 3 nm at 30 keV 8 nm at 3 keV Low Vacuum Mode: 3.5 nm at 30 keV with BSE detector* 3.5 nm at 30 keV with LVSTD detector*

  • optional detectors Maximum Field of View: >50 mm at max WD