Physical Electronics, Inc. (PHI)
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Quantes - Model XPS/HAXPES -Scanning Microprobe
The PHI Quantes is the only commercially available automated, high-throughput lab-based HAXPES spectrometer. It is a unique scanning X-ray photoelectron microprobe that combines a high energy (HAXPES) monochromatic X-ray source (Chromium Kα) with a conventional monochromatic soft X-ray source (Aluminum Kα). Both sources are high flux focused X-ray beams that can be scanned across the sample surface and can be used to define analysis points, areas, lines, and maps with 100% confidence. The analytical information depth using the Cr X-ray source is about 3 times deeper than with the Al X-ray source. This opens opportunities for probing thicker film structures and buried interfaces, as well as minimizing the effects of surface contamination and ion-induced chemical damage during depth profiling. Bring HAXPES synchrotron capabilities into your lab with the PHI Quantes!
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The Only Fully Automated High-Throughput Lab-Based XPS/HAXPES Instrument On The Market Commercially Available
- Large sample handling
- Multiple parking positions
- Automated sample transfer and handling
- Fast automated switching between XPS and HAXPES modes
- The unique scanning X-ray microprobe allows SEM like navigation with point-and-click control
- X-ray induced secondary electron imaging (SXI) provides perfect correlation between imaged areas and spectroscopy
- Highest small area sensitivity on the market
- <10 microns microprobe size in x and y for Al X-ray source and <14 microns for Cr X-ray source
- Image registration for unattended automated micro-area analysis
Optimized Depth Profiling
- Multiple ion gun options (monatomic Ar, dual Ar and cluster GCIB) for a variety of organic and inorganic
- Full 5-axis stage functionality including rotation/tilt and heating/cooling during sputtering
- Multipoint profiling within a single sputter crater for on/off defect analysis and precious samples
- Adjustable solid collection angle for improved angular resolution for Angle Resolved analysis with advanced software for high-throughput film structure analysis
- Heating and Cooling in situ
- Electrochemical (biasing, polarization studies) experiments
- Glove Box Adapter
