Sputtering Components, Inc. (SCI)
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SCIModel MM-Series -Mid-Size External-Mount End Block

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The MM is our mid-size external-mount end block. It uses the same patented technology as our internal end blocks to deliver outstanding value, performance and reliability but has a wider substrate coverage and a customizable drive shaft length.

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Fill and drain

Patented; water completely fills the target for cooler operating temperature/high power; completely drains for target changes

Drive bearings

Exclusive to SCI; tested to verify years of trouble-free operation

Power transfer

Brushless, patented; no brushes to replace and no carbon brush dust; high power rating and reliable power transfer

Vacuum, water seals

Dual lip and redundant; tolerate running dry; easily replaced without removing the end block; can be monitored

Target attachment

Attaches to targets from any vendor for economical sourcing; high load bearing; fast target changes

Mounting

Can be mounted in any orientation using existing mounting holes and utility connections; externally adjustable sputter angle

Drive

Robust, reliable inverter-duty motor and belt drive; motors mounted inward, outward or anywhere around the housing; monitored rotation

Type

Simple, singled-ended design with outboard support if required for quick target changes, high reliability and easy maintenance; for 125 mm ID targets

Electrical rating

100 kW; 1500 V / 225 A (DC or 80 kHz AC)

Target maximum length

2500 mm

Maximum load

1000 kg horizontal

200 kg vertical

Dimensions

See the dimensional drawings

Maintenance

Typical requirements:

  • Seal kit and bushings every 2 years (1 hour); The end block can stay mounted with external utilities attached.
  • Static seals, bearings and belt after 10 years (3 hours)

Do-it-yourself on your schedule and in your facility. Instructional videos are available.

Custom tools available