Sputtering Components, Inc. (SCI)
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SCIModel SM -Largest External-Mount Swing Cathode

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The SMS is our largest external-mount Swing Cathode. The magnet pack swings in a programmable rotary axis that is independent of the rotating target tube, making it an ideal system for display or 3D part coating. Uniformity of < ±1% can be achieved on a static substrate (compared to > ± 15% on static substrates when not using swing). Other uses for Swing Cathodes™ are to pivot the magnet bar to a burn-in location or to make magnet bar position adjustments via remote control. Swing Duo™ software helps determine motion profiles.

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Fill and drain

Patented; water completely fills the target for cooler operating temperature/high power; completely drains for target changes

Drive bearings

Exclusive to SCI; tested to verify years of trouble-free operation

Power transfer

Brushless, patented; no brushes to replace and no carbon brush dust; high power rating and reliable power transfer

Vacuum, water seals

Dual lip and redundant; tolerate running dry; easily replaced without removing the end block; can be monitored

Target attachment

Attaches to targets from any vendor for economical sourcing; high load bearing; fast target changes

Mounting

Can be mounted in any orientation using existing mounting holes and utility connections; externally adjustable sputter angle

Drive

Robust, reliable inverter-duty motor and belt drive; motors mounted inward, outward or anywhere around the housing; monitored rotation

Type

Simple, singled-ended design with outboard support if required for quick target changes, high reliability and easy maintenance; for 125 mm ID targets

Electrical rating

200 kW; 1500 V / 450 A, (DC or 80 kHz AC)

Target maximum length

4000 mm

Maximum load

2000 kg horizontal

400 kg vertical

Dimensions

See the dimensional drawings

Maintenance

Typical requirements:

  • Seal kit and bushings every 2 years (1 hour); The end block can stay mounted with external utilities attached.
  • Static seals, bearings and belt after 10 years (3 hours)

Do-it-yourself on your schedule and in your facility. Instructional videos are available.

Custom tools available