Amtech Systems, Inc.

Semiconductor & Solar Solutions Tempress Systems,Horizontal Diffusion & LPCVD Furnace Systems

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Semiconductor & Solar Solutions Tempress Systems, Inc. develops and manufactures horizontal diffusion & LPCVD furnace systems and offers innovative and creative solutions combined with safety, quality and advanced technology to fit the requirements of your particular applications.

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Tempress product range & services:

  • Horizontal production furnaces
  • Small batch and R&D horizontal furnaces
  • Small batch and R&D vertical furnaces
  • Reactive Ion Etch (RIE) systems
  • Plasma Etch & Deposition systems (RIE, ICP & PECVD)
  • Training
  • Retrofits
  • Spareparts
  • Integrated Automation with IBAL Full Automation and Atmoscan® Processing Tool

 

Applications Tempress Equipment:

  • Semiconductors
  • Photonics
  • MEMS
  • Photo Voltaics Industry (solar)
  • Nanotechnology
  • Hybrids