Companies
Starfire Industries, LLC
Products
Starfire Industries - Model Radion - ...

Starfire Industries - Model Radion -Surface Wave Plasma Tool

FromStarfire Industries, LLC

SHARE

A surface wave plasma tool that reduces chamber cycle times with fast, damage free processing integrated on existing equipment.

Most popular related searches

atomic layer deposition

Works with reactive gas chemistries
Damage-free processing for nearly all materials
Save at least ½ second per PEALD half-cycle
Fast pulsed (<1msec) or steady state operation
No matching network required
Compact size

Plasma Enhanced Atomic Layer Deposition (PEALD)
Plasma Enhanced Chemical Vapor Deposition (PECVD)
Etching, Ashing, Cleaning