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IST AG - Model SFS - 1000 SCCM EvalKit -Thermal Mass Flow Module
Thermal mass flow module with linearized digital / analog output. Fast and compact flow module, suitable for gas dosing systems, manifolds and analysers; Practical Evaluation Kit with fluidic block adapter for direct tube atachment, M5-4 connectors for 4mm tubing included (exchangable).
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- Product Name: SFS01-M-01000
- Operating flow range: +/-1000sccm (ml/min)
- Measured medium: Gas Flow
- Operating temperature range: 0 to 80 °C
- Housing material: Aluminium, FR4
- Fluidic connection: M5-4mm tube adapter or Ø 2.2 mm i.D. flat gasket (w/o fluidic block)
- Flow channel inner dimensions: 2.2 mm
- Wetted materials: Aluminum, gold, FR4, silicon, silicon nitride, epoxy, nitrile, brass
- Connection type: PCB connector JST SM08B-SRSS-TB
- Response time t63: 20 ms
- Output signal: I2C or 0 to 1 V
- Accuracy: 2% f.s. (digital output)
- Repeatability: 0.2 % f.s.
- Product cod: 156602