Kurt J. Lesker - Model PRO Line PVD 75 -Thin Film Deposition System Platform
The Kurt J. Lesker Company PRO Line PVD 75 is the next generation thin film deposition system based on the workhorse PVD 75 platform. With more than 400 units in service worldwide, the PVD 75 is a proven, robust, and versatile design. The PRO Line PVD 75 builds on the successes of the original design with improved system base pressures and pump down times. A technically superior chamber design, an industry best software control system with advanced programming capability, automatic substrate loading, and numerous features for optimized thin film performance are a few of the key advantages offered in this innovative, best of class design.
The PRO Line PVD 75 is compatible with the following techniques:
- Thermal Evaporation (up to 4" individual boats, or six 2" boat assemblies)
- Torus Magnetron Sputtering sources (up to six 2" or 3" sources)
- Electron Beam Evaporation Source (4 pocket 8cc, 8 pocket 12cc, 6 pocket 20cc)
- LTE10 Organic deposition sources (up to two)
- Combinations of the above techniques are also available.
- Custom configurations are available upon request
KJLC`s software allows user friendly recipe creation along with a reliable, uninterruptable processing module that allows process completion, regardless of the state of the computer user interface. For more information on this intuitive, unique, and reliable software package, please see the Software Tab.
Modular Process Chamber
- Box Shaped 304L Stainless Steel chamber: 15.25" wide x 16.50" deep x 24" high (387.4mm wide x 419.1mm deep x 609.6mm high), internal dimensions.
- This chamber comes standard with up to ten spare ports (2-3/4" CF) depending on system configuration.
- Please see the performance tab (above) for information on pumpdown times and base pressures
Vacuum Pumping & Gauging
- Pfeiffer 790 L/s turbomolecular pump with a KJLC RV212 oil sealed roughing pump. Base pressure for a properly conditioned chamber is 2 x 10-7 torr (2.67 × 10-7 mbar).
- Wide range gauge reads from atmosphere to 10-9 Torr.
Safety
Fully enclosed system electronics rack.
- *Compact frame, 53.41" wide x 36.18" deep x 75.75" high (1356.7mm wide x 919mm deep x 1924.1mm high)
- *Zero footprint wall mounting available
- Allows all electrical components to be safely housed behind lockable cabinet doors.
- EMO Protection is standard on all KJLC systems.
- Isolation transformer and safety interlocks are standard on all KJLC systems.
*System dimensions and mounting dependent on options selected.
Quality
Utilizing industry leading components allows KJLC to produce the highest quality PVD R&D tool on the market. Components and key manufacturing points are:
- One year warranty standard
- Pfeiffer Turbomolecular pumps
- CTI-Cryogenics Cryopump Systems
- VAT high vacuum valves
- KJLC Torus sputter sources, and power supplies
- Orbital welding on all process gas lines / manifolds
- CE marking is a standard on the PVD75 with CSA and NRTL available upon request
