MKS - Model AX8415 -Ultra Clean Ozone Generator

The AX8415 is the most innovative and versatile ozone generator developed by MKS. Ultra clean, ultra high concentration, high flow ozone is produced by this generator’s novel architecture and patented cell design, converting oxygen to > 400 g/Nm³  of high concentration ozone for leading-edge applications in the semiconductor, flat panel display, and photovoltaic industries. The technology designed into the AX8415 is the basis of this generator’s versatility. Product Features Ozone is used in the formation of CVD and ALD thin films, oxide growth, photoresist removal, and multiple cleaning applications. The AX8415 has the capability to support all these applications by producing the highest concentrations of ultra clean ozone with or without the addition of nitrogen as a dopant gas. Removing the minute amount of nitrogen used in the formation of ozone eliminates the formation of NOx compounds, if required for a given application.