ULVAC GmbH
ULVAC - Model G-TRAN Series -Pressure Sensor Unit (SAU)
FromULVAC GmbH
A pressure sensor unit that is adopting a semiconductor type thin- film element. By this can measure near to the atmosphericpressure (Gaugepressure: -100kPa~10kPa) with high accuracy. To be compatible for a high vacuum pressure SUS316L is adopted.
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- Corresponding to the continuous use of high vacuum pressure process.:
- Semiconductor t ype thin- f i lm element i s adopted to be compatible for a high (SUS316L)
- Suitable for atmosphere pressure check:
- Pressure standard is corresponding with gauge pressure and a high accuracy measurement is capable
- Measurement output signal:
- Pressure is set to DC 0 to 5V Log out signal as a standard
- Rotate Generator:
- Compatible in wide for DC12 to 24V
- Quick coupling standard:
- Adopting a NW16 port
- To confirm the atmospheric pressure of PV, FPD, SEMICONDUCTOR
system which contain high vacuum components - To conf i rm the atmospheric pressure of Indust rial Vacuum
Equipment like furnace systems which contain high vacuum components - To the vacuum system that require the high accuracy measurement of -100kPa~10kPa
- Gauge pressure (Absolute pressure:10+4~10+5Pa)