Applied Energy Systems, Inc.
VERSA-GAS vSource - Gas Source Systems
VERSA-GAS™ vSource™ Gas Cabinets address diverse high purity gas delivery requirements across a variety of environments, with safety top of mind. Every vSource™ model is designed to ensure reliable, safe delivery and storage of hazardous and non-hazardous process and purge gases, and comes in a variety of configurations to fit distinct process demands.
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- Conforms to SEMI S2 Standards
- Conforms to Uniform and International Building and Fire Codes
- Pressure Tested @ 110% Maximum Operating
- Pressure for 4 Hours Helium Leak Tested to 1x10-9 atm-cm3/sec
- Continuous System Monitoring and Control
- User Definable Alarms and System Limits
- Automatic System Shutdown
- Class 100 Cleanroom Welding
- 316 L Stainless Steel Construction
- 15 Ra. Max Component Internal Material Finish
- UHP Springless Diaphragm Valves
- Tied Diaphragm Pressure Regulators
- Orbitally Welded Manifold Components
