MOT Mikro - Model µCHEM -Wet Bench System

Designed for the use in clean room environment, the shell is made of polypropylene or stainless steel for solvent applications.  Suitable for etching application in the field of micro technology and semiconductors. Heatable Quartz Tank for clean wafer processing. Additional process cells could be integrated, made of PTFE, PVDF, PP,… Circulation and Heating systems. Fire extinguishing on request. Fully automatic process. Fully automatic chemical drain and dosing on request. Compatible to different wafer size up to 12", fully automatic handling of the Carriers.