Bestech - Model Micro-Epsilon IMS5420 -White Light Interferometer for Thickness Measurement of Silicon Wafer
The Micro-Epsilon IMS5420 is a state-of-the-art white light interferometer designed for the non-contact thickness measurement of monocrystalline silicon wafers. It is a compact system which is suitable for measurement applications in area where space is restricted or limited. Featuring a broadband superluminescent diode (SLED) with a 1,100 nm wavelength range, it is adept at measuring undoped, doped, and highly doped SI wafers with unparalleled precision.
Integration and Interfaces
Controller Interfaces: Integrated interfaces like Ethernet, EtherCAT, RS422, additional encoder connections, analog outputs, synchronization inputs, and digital I/Os.
Additional Integration: Using Micro-Epsilon`s interface modules, PROFINET and EthernetIP compatibility is provided, enabling integration into various control systems and production programs.
- Nanometer-Accurate Measurement: Ensures precision in measuring undoped, doped, and highly doped wafers.
- Multi-Layer Detection: Capable of acquiring up to 5 layers with a silicon thickness range of 0.05 to 1.05 mm.
- High Resolution: Offers a high z-axis resolution of 1 nm.
- Fast Measurement: Achieves a measuring rate of up to 6 kHz.
- Versatile Connectivity: Supports Ethernet, EtherCAT, RS422, PROFINET, and EtherNet/IP.
- User-Friendly Interface: Allows easy parameterization via a web interface.