Ebara Technologies Inc, Components Division, is now the Semiconductor Applications representative for ASC2T, Advanced Semiconductor Cleaning / Coating Technology. The ThermaGas Process is a new cleaning technique that utilizes High Temperatures, Reactive Gases and High Vacuum to remove the contaminated residue from parts used in the manufacture of semiconductors. This process is especially useful on parts made from ceramic or graphite materials. It is much more cost effective and environmentally friendly than traditional methods using media blasting and wet chemical etchants.
