EESS Clean Area Qualification / HVAC System Services Scope
Cleanroom Validation/HVAC Validation is performed :
Airflow velocity test ,
Air flow volume and Room air change rates ,
HEPA filter integrity testing ,
Non-viable particulate Counting ,
Recovery time test ,
Airflow visualization testing ,
Air Pressure Difference between rooms ,
Temperature and Relative humidity measurements ,
and Laminar Air Flow Unit Qualification.