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Korvus Technology - Thin Film Deposition Systems and Niobium Software
Korvus Technology produces the HEX range of thin film deposition systems, which are configurable to precise requirements. The systems can be adapted to include varying levels of manual or automatic control, incorporating innovations such as automated shutters for enhanced accuracy in thickness measurement and rate control. The system design features a modular, user-friendly structure suited for complex deposition tasks. Each source in the TAU-4 model is equipped with a flux monitoring plate, allowing for precise evaporation rate monitoring across multiple pockets, facilitating the growth of sub-monolayer films and accommodating higher deposition rates. The QCM technology enables precise monitoring of deposition thickness and rate, available in both manual and automated versions. Furthermore, Korvus Technology offers high vacuum load lock options for maintaining vacuum integrity during sample introduction, along with diverse shutter configurations for comprehensive material deposition management. The Niobium software supports full system control and customization, ensuring alignment with specific user needs.Most popular related searches
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The custom software supplied with the HEX range enables full recipe control and allows multiple users to create complex deposition runs in a matter of minutes. The functions available include;
- Shutter operation
- Gas flow control
- Valve control
- Custom programme creation for specific deposition runs
- Thickness measurement and rate monitoring
- Sample rotation
- Logging
- Load lock pump down and venting
- Chamber pressure control
- Pump control
- Sample heating
- Power control for all sputtering and thermal sources