Agnitron Technology, Inc.
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Version Imperium-MOCVD -Control Software and Automation

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Imperium-MOCVD™ Control Software and Automation is a modern Windows operating system based SCADA package for controlling MOCVD equipment and processes. It was developed for extending the life of Legacy CVD (or any custom) systems and upgrading these large capital investments with state of art control and data logging capabilities. Imperium-MOCVD™ is a direct replacement for Legacy Emcore, Veeco, Thomas Swan, Aixtron, TNSC and Structured Material Inc. (SMI) OEM Control Software and Automation and offers many new features setting a new bar for MOCVD control flexibility. Imperium main reactor screen displays system configuration and operations in real time.

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  • Real Time Control and Monitoring
    Manual or automated process control
    Routines used for automated standard equipment operations
    User created recipes automate process control and execution
    Feedback control from user metrology available during recipe execution
    Real-time or historical data plotting and analysis available
    Powered by SQL database
  • Replace Unsupported OEM Controls
    MOCVD hardware has a long life that can be significantly extended by upgrading to Imperium-MOCVD™ Control Software and Automation, affording maximum return on significant capital investments.
    State of art replacement for Control Software and Automation no longer supported by OEM
    Drop-in replacement for Emcore/Veeco (EpiView, Nexus) and Thomas Swan/Aixtron control systems
    Imperium Control Software and Automation was designed to control CVD equipment but can be optimized to control any custom equipment powered by PLC
    Easy upgrade and transition process; 95% of software configuration done before onsite upgrade visit by FSE, 3-5 days of equipment downtime required for upgrade
    Special or customer features available; may be provided at no cost or for a fee
  • Easy Controls Modification
    Unmatched versatility and customizability; standard Imperium platform can control any PLC based semiconductor process out of box
    Imperium™ is intrinsically suitable for adaption to many types of PLC based equipment control applications
    Out of box customization features allows users to easily add new devices, configure the device control parameters and then incorporate devices into system routines, recipes, and alarms
    Control modification can be done alone by users, with assistance from Agnitron or by Agnitron
  • Proven Performance
    Imperium-MOCVD™ is installed on MOCVD systems around the world for R&D and 24/7 production process control and monitoring.
    Fully developed and qualified at Agnitron technology and with various industry partners
    Formal testing and release program ensures stability and reliability
    Robust testing cycles include stress, lifecycle and regression testing
    Modular feature design means you only pay for capabilities that matter for your operations
  • Continuous Support and Maintenance
    The Imperium™ control platform is an active product with ongoing development and continuous support and maintenance services.
    Standard 12 months warranty, support and maintenance packages offered with purchase of Imperium Control Software and Automation
    Extended warranty, support and maintenance packages available: software updates, remote support, onsite support
  • Imperium-MOCVD Software Modules
    Imperium™ is offered with a number of optional modules to allow customers to select important features and maximize value if some features are not important to their operation. Following is a list of the basic application features and the various optional modules.
    Closed loop feedback control of temperature
    Piezocon/Epizon MO flow monitoring closed-loop gas flow feedback control
    Stand-alone recipe editing station (supplied with PC or can be installed on user’s PC)
    Remote system notifications (email, SMS)
    Recipe importing module saves time for engineers. Original recipes can be imported directly from OEM software
    Dynamic routines enable user to modify existing routines or create new
    Device editor enables user to add new devices and incorporate them into GUI or routines/recipes and alarms