Zygo Corporation - AMETEK, Inc
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Measurements Solutions for Optical Measurement of Films & Coatings - Monitoring and Testing

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Precise characterization of thick and thin film topography and thickness, and substrate topography. There are many applications in which the deposition and control of films and coatings is critical to enabling functionality or efficiency of devices, including consumer electronics, semiconductors, optics and many more. Such advanced devices often demand accurate characterization of film topography and layer thicknesses to ensure high quality and performance.

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Based on non-destructive, non-contact areal-based optical technologies (CSI - Coherence Scanning Interferometry), our versatile and precise 3D metrology instruments and sensors can measure a diverse range of transparent surfaces with varying topography and layer thicknesses, from 50 nanometers to 150 microns, over an area of microns to millimeters.

To learn more about our capabilities, please see our highlighted application solutions below, or contact us to discuss your application with a sales engineer.

A measurement showing a partial overcoat of transparent film on a device. Topography maps are shown for both the film surface, and the substrate surface.

ZYGO’s patented Model-Based Analysis (MBA) technology enables simultaneous measurement of top surface topography, film thickness and substrate topography for transparent, single-layer films with a thickness range of 50 to 2000 nm.

ZYGO’s standard thick films analysis tools provide thickness mapping of films with optical thickness in the 1 to 150 µm range, as well as the top surface of films from 0.4 to 150 µm in thickness.

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