Attolight AG products

The Säntis 300 by Attolight is a fully automated cathodoluminescence microscope designed for 150, 200, and 300mm wafers. It allows for manual loading of smaller or irregularly shaped substrates on 300mm susceptors, which are then handled automatically. The system supports three acquisition modes: step and repeat for repetitive acquisitions, AWpix for medium resolution imaging across the wafer, and FWbrush for high-speed, low-resolution imaging of the full wafer. Attolight's quantitative cathodoluminescence integrates a custom electron column with light collection optics, offering a field of view up to 300 μm and high light collection uniformity across the field of view. The technology enables the creation of hyperspectral and panchromatic maps, producing detailed UV-Visible and NIR emission spectra. The system is upgradeable from P1 to P3 configurations and is suitable for microstructured LEDs, LED quality control, defect counting in GaN, and SiC substrate quality control applications.

The Allalin is a nanometer resolution spectroscopy instrument that utilizes a patented optical collection objective integrated within the SEM column. This versatile platform supports a wide range of spectroscopic analyses through its multiple sources, including electronic and laser modes (continuous or pulsed), and various detectors such as PMT, CCD/Streak cameras, TCSPC/ADP, and Raman detectors. It can accommodate small samples from a few micrometers to wafers up to 6 inches and operates at temperatures from room temperature down to 10K, facilitated by an integrated Helium cryostat with copper braid coupling. This system can be equipped with options like an EBIC system, nanoprobes, and an HV transfer unit. Applications of the Allalin include exciton diffusion, GaN physics, nanorod and nanowire studies, plasmonics, laser diode aging, defect analysis, and substrate quality control. It is also used in the development of photovoltaic materials and other semiconductor research, supporting a wide range of materials including III-V and II-VI semiconductors and perovskites.

The Mönch add-on is a specialized tool designed for transmission electron microscopes (TEM) that offers dual functionality in both light collection and light injection modes. Equipped with a unique mirror design, the Mönch allows for external coupling via either free space or optical fiber. In light collection mode, the system boasts an exceptional signal-to-noise ratio, leveraging features like a motorized arm with a 30mm X travel, a highly reflective mirror, and an optimized module. In light injection mode, it enables superior performance levels, facilitating electron imaging and light emission post-light or thermal excitation. This add-on is particularly effective for applications in semiconductors, time-resolved cathodoluminescence (CL), monolayers, and plasmonics. The proprietary reflective mirror is held by a retractable arm, ensuring independency from the sample holder while maintaining a low mirror-sample distance. With its patented asymmetric fiber, the Mönch stands out in both academia and industry for cutting-edge research.