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Attolight - Model Säntis 300 -Full Wafer Cathodoluminescence Microscope
The Säntis 300 by Attolight is a fully automated cathodoluminescence microscope designed for 150, 200, and 300mm wafers. It allows for manual loading of smaller or irregularly shaped substrates on 300mm susceptors, which are then handled automatically. The system supports three acquisition modes: step and repeat for repetitive acquisitions, AWpix for medium resolution imaging across the wafer, and FWbrush for high-speed, low-resolution imaging of the full wafer. Attolight's quantitative cathodoluminescence integrates a custom electron column with light collection optics, offering a field of view up to 300 μm and high light collection uniformity across the field of view. The technology enables the creation of hyperspectral and panchromatic maps, producing detailed UV-Visible and NIR emission spectra. The system is upgradeable from P1 to P3 configurations and is suitable for microstructured LEDs, LED quality control, defect counting in GaN, and SiC substrate quality control applications.
Attolight’s Quantitative CL-SEM offers “No Compromise” large field fast scanning simultaneous acquisition of SEM images, hyperspectral CL maps, and optical spectra.
Smaller diameter wafers, or miscellaneously shaped substrates are manually loaded on intermediary 300mm susceptors subsequently handled automatically by the tool.
The Santis 300 system offers 3 distinct acquisition modes: step and repeat (S&R), continuous scanning mode (AWpix), integrative scanning mode (FWbrush)
- up to 300 mm wafer tool
- High CL-SEM throughput
- Simultaneous SEM imaging and optical signature acquisition
- Edge detection for accurate wafer positioning (better than 10µm)
- Automated wafer bow mapping and correction
Various system configurations are available, the system is fully upgradeable from P1 to P3:
- P1: manual loading system, no loadlock
- P2: manual loading system, loadlock
- P3c: open cassette system
- P3e: EFEM system
The Attolight Quantitative Cathodoluminescence technology comprises a custom designed electron column with tightly integrated light collection optics. The light collection optics features a field of view of up to 300 μm. The light detection path is carefully optimized and fully aperture matched to guarantee highest light collection uniformity (+-1%) over the FOV. The carefully integrated design and optimization of light and electron optics make high measurement speeds, accuracy and repeatability possible. Quantitative CL produces UV-Visible and NIR hyperspectral maps (full emission spectrum in every pixel) or panchromatic maps (intensity of defined wavelength in every pixel).