cyberTECHNOLOGIES GmbH products

The CT 350S is a non-contact profilometer with a 350 mm x-, y-scanning stage and a closed loop 200 mm z-axis. All 3 axis use air bearings and magnetic linear motors. The system is based on a massive granite construction with a vibration isolated floor stand. The xy motion system offers exceptional performance with an error of less than 100 nm. During the scanning process the z-axis can follow the shape of the part. The height reading is a combination of the calibrated z encoder signal and the sensor height. This allows the system to achieve a very high resolution over the entire z-axis range of 200 mm. The CT 350S was originally designed and is ideal for measuring precision optics. However, contour measurements, step height, roughness and other 2D and 3D analyses are excellent examples of further applications. The sensors are available with a resolution down to 3 nm.

The CT 350T is a non-contact double-sided optical profilometer with a 300 mm x-, y- scanning stage. The top- and bottom-sensor are mounted on highly accurate z-axes with 100 mm travel. The double sided autofocus function allows to measure even extremely bowed or warped parts. Both sensors collect height data synchronized with x-, y- encoder signals and are aligned axially in order to ensure accurate differential thickness measurements. The software generates 2D profiles and 3D maps simultaneously from the top and the bottom surface and calculates the corresponding total thickness profile or map.

The CT 300 is a non-contact profilometer with a 315 mm x-, y-motion system. It can handle up 12” wafers or other large substrates and parts. Using a chromatic white light sensor and a data collection rate of up to 20 kHz the inspection time is minimized. The confocal microscope and 3D white light interferometer sensors offer unmatched resolution in z-direction down to 0.1 nm. With our multi-sensor technology several sensor heads can be mounted simultaneously including infrared interferometers for measureing wafer thickness.

The CT 100 is a compact, high resolution non-contact profilometer. The main components of the system are a white light sensor and a x-, y-motion system on a granite platform. The chromatic white light sensors combine high accuracy and high measurement speed. The sensors are available with a resolution down to 3 nm and measurement range up to 12 mm. The system can scan a maximum area of 150 mm x 150 mm. The unique cyberTECHNOLOGIES Software offers sophisticated surface metrology analysis and automated measurement routines.

The CT R200 is a non-contact profilometer with a rotary stage, a 200 mm x-axis, and an automated z-axis. The round part is placed on the rotary stage, the x- and the z-axis move the sensor close to the surface of interest. The autofocus routine then positions the sensor in the optimal distance to the surface. The sample starts rotating and the system collects highly accurate profiles along the inner and outer diameter. Using the automated x- and z- axis, different diameters on the same part can be scanned. The confocal sensor can measure with a data rate of up to 20 kHz. A scan of a 100 mm diameter with a lateral resolution of 5 microns takes 7 seconds. The height resolution of the sensor is 10 nm at a measurement range of 300 microns.