Ebara Technologies Inc products

EBARA’s Applications Engineering groups in Japan and the U.S. continue to push the envelope required for tomorrow’s devices. Whether this entails planarizing exotic new materials or providing proven solutions for today’s Copper, Oxide, Tungsten, or STI challenges across an array of technology nodes and device types, EBARA has a CMP system with industry leading technology options to meet your requirements.  EBARA is recognized as the benchmark for industry leading production and reliability standards and has been rewarded with continued year-over-year market share growth.

EBARA’s Applications Engineering groups in Japan and the U.S. continue to push the envelope required for tomorrow’s devices. Whether this entails planarizing exotic new materials or providing proven solutions for today’s Copper, Oxide, Tungsten, or STI challenges across an array of technology nodes and device types, EBARA has a CMP system with industry leading technology options to meet your requirements.  EBARA is recognized as the benchmark for industry leading production and reliability standards and has been rewarded with continued year-over-year market share growth.

EBARA’s ozone-related equipment includes the Ultra High Concentration Clean Ozonizer (Ozone Gas Generator, OZC) which produces high concentrations of virtually impurity free ozone gas by using a unique trench discharge cell system developed by EBARA.

With EBARA’s unique compact construction with low noise and low power consumption, this air-cooled pump series needs no coolant water enabling flexible installations suitable for many vacuum applications within various environments such as production plants, testing and research laboratories. The EV-A03 Series vacuum pumps are designed for repeated pumping performance from atmospheric pressure down to the millitorr range. These are ideal replacements for wet pumps and scroll pumps; no more frequent oil changes, costly rebuilds or base pressure drift. Typical applications for EV-A03 dry pumps include load locks, PVD systems, analytical instruments, metrology equipment and ideal for wet/scroll replacements that require the best vacuum performance and optimum uptime.

With EBARA’s unique compact construction with low noise and low power consumption, this air-cooled pump series needs no coolant water enabling flexible installations suitable for many vacuum applications within various environments such as production plants, testing and research laboratories. The Model EV-A06 Series vacuum pumps are designed for repeated pumping performance from atmospheric pressure down to the millitorr range. These are ideal replacements for wet pumps and scroll pumps; no more frequent oil changes or rebuilds and zero base pressure drift. Typical applications for EV-A06 dry pumps include load locks, PVD systems, analytical instruments, metrology equipment. Perfect for all applications that require the best vacuum performance and optimum uptime.

The EV-A10 Series air cooled dry vacuum pumps have industry leading specifications. The non-contact, multi-staged roots technology is designed for reliable, particle free vacuum generation. Compact form factor and air cooling for easy installation. These are ideal drop in replacements for wet pumps and scroll pumps; no more frequent oil changes, costly rebuilds or base pressure drift.