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Ebara Technologies Inc
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EbaraTech - Model EV-A10 - Dry Vacuum ...

EbaraTech - Model EV-A10 -Dry Vacuum Pumps

FromEbara Technologies Inc

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The EV-A10 Series air cooled dry vacuum pumps have industry leading specifications. The non-contact, multi-staged roots technology is designed for reliable, particle free vacuum generation. Compact form factor and air cooling for easy installation. These are ideal drop in replacements for wet pumps and scroll pumps; no more frequent oil changes, costly rebuilds or base pressure drift.

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Single- and 3-Phase, 50/60 Hz, 200-240VAC Models
N₂ Purge Capability
Side exhaust (top optional)
Hardware: Check Valves & Silencers
Pump Systems – Integrated Rack Solutions
Pump Installation Lifts
Reusable Shipping Crates with Optional Ramp

Typical applications for EV-A10 dry pumps include load locks, PVD systems, analytical instruments, metrology equipment. Ideal replacement for rotary vane oil pumps or scroll pumps on systems that require an upgrade in vacuum performance and uptime.

Oil-Free
Low Energy Consumption
Compact/Lightweight Small Footprint
Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
Various Pump Configurations According to Process Applications
Air-Cooling Pump for Non-Reactive Gases
Low Noise
No-Contact Design
High Pumping Speeds at Atmosphere
High Water Vapor Pumping
Plug and Play for Flexible Installation
SEMI S2, CE and NRTL

Analytical Instruments (LCMS, ICPMS, Mass Spec & Electron Microscopes)
Atomic Layer Deposition (ALD)
Freeze & Vacuum Drying
Lithium-Ion Battery Manufacturing
Load Locks
Oxygen Plasma Systems
Packaging
Physical Vapor Deposition (PVD)
Plasma Cleaning
Solvent Cleaning
Sputtering