Eumetrys
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Unpatterned Wafer Default Inspection
Eumetrys - Model YPI-MX-DC - Particles Inspection Unit for Transparent Substrates
YPI-MX-DC model detects on transparent substrates, contamination of particles up to 0.1µm. Working on wafers from 2 to 8 inches, it can inspect materials such as SiC and GaN. Its laser of 355nm of wavelength eases analysis on compound semiconductor industry substrates. For the most exotic applications, it is possible to double the number of optical heads. It is also possible to add a second detector channel which improves measurement accuracy.
