Filmetrics - KLA Corporation products

Get an optical profilometer for less than half the price of an AFM or 3D stylus profilometer! The Profilm3D^® uses state-of-the-art white light interferometry (WLI) to measure surface profiles and roughness down to 0.05µm; adding the low-cost PSI option takes the minimum vertical feature size down to 0.001µm. The newest generation of the Profilm3D offers Enhanced Roughness Mode for accurately imaging rough surfaces and highly-sloped sidewalls.

Filmetrics R-Series sheet resistance mapping tools marry the technology developed and perfected by KLA for over 45 years with the benchtop instrument technology developed over the last 20 years by the Filmetrics team. The R50-4PP contact four-point probe is recommended for thin metal and ion implant layers, and the R50-EC non-contact eddy current probe is recommended for thicker metal layers and soft or flexible surfaces, including: Semiconductor wafer substrates, Glass substrates, Plastic (flexible) substrates, PCB patterned features, Solar Cells, Flat panel display layers and patterned features, Metal foils

F20s are general-purpose film thickness measurement instruments, and are used in thousands of applications worldwide. Thickness and refractive index can be measured in less than a second. Like all of our thickness measurement instruments, the F20 connects to the USB port of your Windows™ computer and sets up in minutes. The different F20 instruments are distinguished primarily by the thickness measurement range, which in turn is determined by the instrument`s wavelength range. The standard F20 is our most popular product.

Measure Reflectance and Transmittance Simultaneously. The F10-RT reflectometer captures reflectance and transmittance spectra with a single mouse-click. For a fraction of the price of legacy reflectometry systems, users can measure min/max and color. Optional thickness and index measurement modules provide access to all of the analytical power of the Filmetrics F20. Data can be exported and printed easily.

The F3-sX family measures semiconductor and dielectric layers up to 3 mm thick. Such thick layers tend to be rougher and less uniform than thinner layers, which the F3-sX counters with a 10-µm-diameter measurement spot. With it the F3-sX family easily measures materials that are impossible to measure with other instruments. Measurement rates of up to 1 kHz also make the F3-sX a top choice for many in-line applications (e.g. roll-to-roll processes).

Turn Your Microscope into a Film Thickness Measurement Tool. The F40 product family is for applications that require a spot size as small as 1 micron. For most microscopes the F40 simply attaches to the c-mount adapter, which is the industry standard for video camera mounting. The F40 comes complete with an integrated color video camera that allows exact monitoring of the film thickness measurement spot. Thickness and index can be measured in less than a second. Like all of our tabletop film thickness measurement instruments, the F40 connects to the USB port of your Windows™ computer and sets up in minutes.

The Filmetrics F50 family of products can map film thickness as quickly as two points per second. A motorized R-Theta stage accepts standard and custom chucks for samples up to 450mm in diameter. Map patterns can be polar, rectangular, or linear, or you can create your own with no limit on the number of measurement points. Dozens of pre-defined map patterns are supplied. The F50 film thickness mapping system connects to the USB port of your Windows™ computer and can be set up in minutes. The different F50 instruments are distinguished primarily by thickness and wavelength range. The standard F50 is the most popular. Generally shorter wavelengths (e.g. F50-UV) are required measurement of thinner films, while longer wavelengths allow measurement of thicker, rougher, and more opaque films.

Thin-film thickness of samples up to 450 mm in diameter are mapped quickly and easily with the F54 advanced spectral reflectance system. The motorized r-theta stage moves automatically to selected measurement points and provides thickness measurements as fast as two points per second. Choose one of the dozens of predefined polar, rectangular, or linear map patterns, or create your own with no limit on the number of measurement points. The entire desktop system is set up in minutes and can be used by anyone with basic computer skills. The F54 film thickness mapping system connects to the USB port of your Windows® computer and can be set up in minutes. The different instruments are distinguished primarily by thickness and wavelength range. Generally shorter wavelengths (e.g. F54-UV) are required for measurement of thinner films, while longer wavelengths allow measurement of thicker, rougher, and more opaque films.

Film thickness is measured in-line quickly and easily with the affordable F32. Spectral analysis of reflectance from the top and bottom of your film provides thickness information in real time. The F32 advanced-spectrometry system comes in a half-width 3U rack-mount chassis and, with additional spectrometers, can measure up to four different locations (up to two locations for -EXR and -UVX versions). The F32 software can be controlled through digital I/O or the host software to start/stop/reset measurements. Measurement data can be exported automatically to the host software for statistical process control (SPC). Filmetrics^® also provides optional lens assemblies for easy integration onto existing production fixtures.