Global Standard Technology Co., Ltd. (GST) products

Features: Dual-stage combustion. Independent Fuel/O2/Air control. ACCS (Air Curtain Cleaning System). Built-in bypass valve. Flash data recording capability. High/Low fuel interface. Integrated redundant abatement option with Dragon-DLE (DUO). Diaphragm pump drain standard / gravity drain option. Fuel options: LNG / LPG. Heater jacket option. pH adjust option: NaOH injection. Auto inlet entry cleaner option. Configurable number of inlets up to 4. Auto inlet entry clean option (Q1 13). Low CDA fan option (Q2 13). Exhaust fan option (Q3 13).

Dual-stage combustion. Independent Fuel/O2/Air control. ACCS (Air Curtain Cleaning System). Built-in bypass valve. Flash data recording capability. High/Low fuel interface. Integrated redundant abatement option. Heater jacket option. pH adjust option: NaOH injection. Auto inlet entry clean option. Natural (gravity) drain standard / pump drain option.

Reactor (process gas path) surface construction with Inconel or ceramic lining. High active thermal ARC Plasma Flame Tool interface run mode (Energy saving mode). ACCS (Air Curtain Cleaning System). Inlet heater jacket option. Pump drain option.

Reactor (process gas path) surface construction with Inconel. SiC heaters with Inconel 600 housing. 850°C operation. CDA for reaction O2. Steam injection Option. ACCS (Air Curtain Cleaning System). Inlet heater jacket option. Pump drain option.

Primary 80 liter cartridge. Bypass mini-cartridge. Standard N2 purge function. 80% color change sight tube. Double-acting pneumatic valves for power failure ride through. Pressure monitoring and relief. N2 eductor for inlet pressure control. Temperature monitoring and auto N2 purge function. Gas monitoring options. In-situ oxidation option.

Inlet N2 Purge. Low pressure drop design. Transparent PVC wet chamber. Large volume demister chamber for gravitational settling. Natural (gravity) drain standard / pump drain option. pH adjust option: NaOH injection. Inlet manifold option.

Packed bed wet scrubbing stage. Fog nozzle wetting stage. Electric precipitator. Precipitator auto rinse. Purge blower for E/P system high voltage contact insulation enclosure. Diaphragm pump drain standard / gravity drain option. 5 HP induction fan option.

System for absorption of heat generated from the semiconductor and FPD manufacturing processes and to supply Working Fluid (Coolant) with consistent temperature required for the processes by cooling the Working Fluid (Coolant, etc.) with Refrigerant System.

System for supply of Working Fluid (Coolant) with consistent temperature in order to maintain low temperature(Chuck temperature : Min -55?) of Wafer Prober Chuck required in the Wafer inspection equipment by cooling the Working Fluid(Coolant) by using Cascade Refrigerant System.