1 software found
Hologenix software
NGS - Automated Microscope for CD, Overlay, and Defect Detection System
The NGS Series includes advanced systems designed to automate optical defect detection and precision dimensional measurements on wafers and other components. These systems are perfectly adapted for both production uses and versatile process development, offering dual functionality. Integrating high-end microscope components from Olympus, Nikon, and Leica, they provide a range of illumination options like brightfield (BF), darkfield (DF), and differential interference contrast (DIC). Precision is emphasized with linear motor staging that features 0.02-micron scales. The NGS Series can be customized based on specific requirements with platforms accommodating up to 200mm or 300mm, as well as robotic platforms for automated handling of wafers and parts.
